(Vacuum assembling equipment, vacuum alignment equipment, vacuum laminator, vacuum aligner)
Equipment to align and laminate two sheet substrates in vacuum with high precision. It can be used for LCD, OLED, or other panel manufacturing processes.
It can handle up to G11 size, and achieve high-precision alignment with repeatability at 1 [um] or less in high vacuum at 1 [Pa] or less, thanks to unique panel chucking, precision alignment, and image processing mechanisms.
Company:Shin-Etsu Engineering Co., LTD.